傑出產品獎｜先進設備及智慧製造類 | 科斯邁股份有限公司 | 高精度曝光機的淨零與韌性系統

得獎技術簡介

本產品『節能與韌性系統』就是針對曝光機的精密環境控制系統作改良來達成節能與韌性，原本的系統都採用舊型的技術（壓縮機冷媒系統）來達成精密溫控精度±0.01 ℃，科斯邁開創一個液冷式的系統（簡稱Eco-tcon）來關掉原系統的耗電部件（壓縮機與冷媒和加熱單元）。因此Eco-tcon 除了液冷本體外（CDM）並加上節能控溫系統（CDC+CDU）達成精度±0.01℃，並取得數項專利，此系統可節省原系統耗能高達80%，並可減少原系統的所有維修與當機的風險，加強曝光系統的韌性。

 

得獎技術創新特色

科斯邁Eco-tcon系統採用創新的外掛式模組設計，透過核心控制器CoreLink實現與原廠曝光機的深度整合。該技術能自動接管並關閉原系統中高能耗的壓縮機冷媒組件，將環境控制權無縫切換至高效能的Eco-tcon模式。

此技術不僅協助客戶實現無痛系統升級，更徹底解決了傳統冷媒系統維護頻繁、易故障的痛點。透過移除不穩定因素，能有效防止生產中斷，將設備的無預期停機時間（Downtime）最小化，顯著強化生產線的營運韌性。

 

得獎技術應用

科斯邁致力於推動精密製程的永續轉型，目前已成功交付>100套曝光機精密環控系統，深受國內兩大面板龍頭及前三大先進封裝廠青睞，並完成5家知名曝光機廠的設備優化。兩大技術亮點：

• 綠色節能再進化：以G6曝光機升級Eco-tcon後，單台年省約12.8萬度電。已累計百套出貨量之減碳貢獻，已超越30座大安森林公園的年吸碳量，相當於為地球植下90萬棵成年樹木。
• 毫釐不差的溫度守護：在能控系統上實現了±0.01℃的溫控精度，確保高階製程的穩定性與良率。

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Gold Panel Awards - Outstanding Product Awards – Advanced Equipment/Smart Manufacturing

Company Name：Coresemi Co.,Ltd.

Technology/Product Name：Empowering High-Precision Lithography: Net-Zero & System Resilience

 

Technology/Product Features

The Eco-Tcon System: Enhancing Energy Efficiency and Resilience Our proprietary "Energy-Saving and Resilience System" is specifically engineered to optimize the precision environmental control of lithography tools. While conventional systems rely on legacy compressor-based refrigerant technology to maintain a precision of ±0.01°C, CORESEMI has pioneered an advanced liquid-cooling solution: the Eco-Tcon. By integrating the Coolant Distribution Module (CDM) with our Energy-Saving Temperature Control units (CDC+CDU), this patented system bypasses energy-intensive components such as compressors and heaters. The result is a staggering 80% reduction in energy consumption and a significant mitigation of maintenance risks and downtime.

 

Innovation

Seamless Integration and Operational Resilience

Featuring an innovative external modular design, the Eco-Tcon utilizes the CoreLink controller for deep integration with original lithography equipment. This technology automatically takes over environmental control, seamlessly deactivating high-power refrigerant components. This "pain-free" upgrade not only eliminates the frequent failures associated with traditional systems but also minimizes unscheduled downtime, substantially bolstering the operational resilience of the production line.

 

Applications

CORESEMI: Driving Sustainable Transformation in Precision Manufacturing.With over 100 systems successfully deployed, CORESEMI is the partner of choice for Taiwan’s top two display leaders and top three advanced packaging facilities. We have optimized equipment for five world-renowned lithography brands through two core technological pillars:

• Advanced Green Energy Saving: Upgrading a G6 lithography tool with Eco-Tcon saves approximately 128,000 kWh per year. Our cumulative carbon reduction from 100+ units exceeds the annual carbon sequestration of 30 Da'an Forest Parks, equivalent to planting 900,000 mature trees.
• Ultimate Temperature Precision: We achieve a temperature control stability of ±0.01°C, safeguarding the stability and yield of high-end semiconductor and display processes.